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Currently not compatible with Amazon Kindle. Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools layout, modeling that can be used for the design of MEMS devices. There's also a final chapter on packaging and testing MEMS devices, as well as exercises and design challenges at the end of every chapter.
Solutions to the design challenge problems are provided online.
A Guide to Hands-On Mems Design and Prototyping By Kubby, Joel A.
Cambridge University Press. Cambridge University Press dates from and is part of the University of Cambridge.
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A Guide to Hands-On Mems Design and Prototyping By Kubby, Joel A. - prosigerer.tk
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